CONFERENCE PROCEEDINGS
Advanced Search
Igor Florinsky
at MV Keldysh Institute of Applied Mathematics RAS
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 31 January 2022 Paper
Techniques for analyzing digital elevation models of surface topography of microelectronics objects
Proceedings Volume 12157, 121571K (2022) https://doi.org/10.1117/12.2623908
KEYWORDS: Surface properties, Surface roughness, 3D surface sensing, Nanotechnology, Semiconducting wafers, Microelectronics, Silicon, Shape analysis, Data modeling, Visualization, Thin films, Mathematical modeling
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top