Dr. Igor A. Ivonin
VP of Engineering at Nano-Optic Devices
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | March 28, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Signal to noise ratio, Imaging systems, Interference (communication), Scanning electron microscopy, Image quality, Optical resolution, Image display, Semiconducting wafers

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Manufacturing, Scanning electron microscopy, Transmission electron microscopy, Image processing software, 3D metrology, Process control, Semiconductor manufacturing, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Etching, Image processing, Scanning electron microscopy, Transmission electron microscopy, Software development, Cadmium sulfide, Semiconductor manufacturing, Critical dimension metrology

PROCEEDINGS ARTICLE | February 21, 2011
Proc. SPIE. 7918, High-Power Diode Laser Technology and Applications IX
KEYWORDS: Mirrors, Optical design, Holograms, Holography, Digital holography, Cladding, Fiber lasers, Semiconductor lasers, Semiconducting wafers, Binary data

PROCEEDINGS ARTICLE | March 27, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Diffraction, Optical filters, Optical lithography, Imaging systems, Printing, Photomasks, Promethium, Critical dimension metrology, Resolution enhancement technologies, Fiber optic illuminators

PROCEEDINGS ARTICLE | March 21, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Mirrors, Image processing, Modulators, Printing, Spatial light modulators, Photomasks, Optical proximity correction, Raster graphics, Fiber optic illuminators

Showing 5 of 10 publications
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