Dr. Igor A. Ivonin
VP of Engineering at Nano-Optic Devices
SPIE Involvement:
Publications (10)

Proceedings Article | 28 March 2018 Paper
S. Babin, S. Borisov, I. Ivonin, S. Nakazawa, Y. Yamazaki
Proceedings Volume 10585, 105852B (2018) https://doi.org/10.1117/12.2299847
KEYWORDS: Scanning electron microscopy, Signal to noise ratio, Image quality, Imaging systems, Optical resolution, Semiconducting wafers, Interference (communication), Image display

Proceedings Article | 19 March 2018 Presentation
Proceedings Volume 10585, 105850K (2018) https://doi.org/10.1117/12.2298389
KEYWORDS: Cadmium sulfide, Scanning electron microscopy, Etching, Transmission electron microscopy, Metrology, Semiconductor manufacturing, Critical dimension metrology, Image processing, Software development

Proceedings Article | 19 March 2018 Presentation
Proceedings Volume 10585, 1058516 (2018) https://doi.org/10.1117/12.2301328
KEYWORDS: Metrology, Critical dimension metrology, Scanning electron microscopy, Semiconducting wafers, Image processing software, Semiconductor manufacturing, 3D metrology, Process control, Transmission electron microscopy, Manufacturing

Proceedings Article | 21 February 2011 Paper
V. Svetikov, I. Ivonin, A. Koshelev, L. Velikov, Yu. Vorobiev, A. Goltsov, V. Yankov
Proceedings Volume 7918, 79180P (2011) https://doi.org/10.1117/12.876354
KEYWORDS: Holograms, Semiconductor lasers, Digital holography, Optical design, Binary data, Fiber lasers, Holography, Mirrors, Cladding, Semiconducting wafers

Proceedings Article | 27 March 2007 Paper
Proceedings Volume 6520, 652038 (2007) https://doi.org/10.1117/12.712053
KEYWORDS: Fiber optic illuminators, Critical dimension metrology, Printing, Imaging systems, Diffraction, Optical filters, Resolution enhancement technologies, Promethium, Optical lithography, Photomasks

Showing 5 of 10 publications
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