Ik-Hyun Jeong
at SK Hynix Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Spatial frequencies, Etching, Scanners, Inspection, High volume manufacturing, Feedback loops, Semiconducting wafers, Overlay metrology

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Optical parametric oscillators, Detection and tracking algorithms, Data modeling, Feature extraction, Optical testing, Scanning electron microscopy, Machine learning, Semiconducting wafers, Overlay metrology

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Metrology, Data modeling, Sensors, Calibration, Scanners, High volume manufacturing, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Scanners, Process control, Critical dimension metrology, Semiconducting wafers, Overlay metrology, Plasma

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