Dr. Ildar Amirov Profile

Dr. Ildar Amirov

at VALIEV INSTITUTE OF PHYSICS AND TECHNOLOGY of RUSS

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 31 January 2022 Paper

Cobalt subtractive etch for advanced interconnects

A. Rogozhin, A. Miakonkikh, A. Tatarintsev, I. Amirov, K. Rudenko

Proceedings Volume 12157, 1215718 (2022) https://doi.org/10.1117/12.2624333

KEYWORDS: Etching, Cobalt, Plasma, Plasma etching, Polymethylmethacrylate, Copper, Reactive ion etching, Scanning electron microscopy, Metals

Read Abstract +

Proceedings Article | 15 March 2019 Paper

Formation of metallic nanowire and nanonet structures on the surface of SiO2 by combine plasma etching processes

I. Amirov, E. Gorlachev, L. Mazaletsky, M. Izyumov

Proceedings Volume 11022, 1102221 (2019) https://doi.org/10.1117/12.2521275

KEYWORDS: Nanowires, Plasma etching, Silicon, Etching, Argon, Plasma, Platinum, Scanning electron microscopy, Nanostructures, Amorphous silicon

Read Abstract +

Proceedings Article | 15 March 2019 Paper

Effect of Ar ion-plasma treatment on residual stress in thin Cr films

A. Babushkin, R. Selyukov, I. Amirov

Proceedings Volume 11022, 1102223 (2019) https://doi.org/10.1117/12.2521617

KEYWORDS: Ions, Chromium, Diffusion, Argon, Thin films, Sputter deposition, Bridges, Microelectromechanical systems, Plasma

Read Abstract +

Proceedings Article | 30 December 2016 Paper

A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing

Ilya Uvarov, Victor Naumov, Olga Koroleva, Elena Vaganova, Ildar Amirov

Proceedings Volume 10224, 102241A (2016) https://doi.org/10.1117/12.2266439

KEYWORDS: Microelectromechanical systems, Switches, Electrodes, Finite element methods, Aluminum, Scanning electron microscopy, Surface micromachining, Photomasks, Semiconducting wafers, Chromium

Read Abstract +

Proceedings Article | 8 January 2013 Paper

Resonance properties of multilayer metallic nanocantilevers

Ilya Uvarov, Victor Naumov, Ildar Amirov

Proceedings Volume 8700, 87000S (2013) https://doi.org/10.1117/12.2016751

KEYWORDS: Nanolithography, Metals, Semiconducting wafers, Surface roughness, Aluminum, Chromium, Nanoelectromechanical systems, Silica, Scanning electron microscopy, Image registration

Read Abstract +

Proceedings Article | 29 April 2008 Paper

Simulation, fabrication, and dynamics characteristics of electrostatically actuated switches

A. Postnikov, Ildar Amirov, V. Naumov, V. Kalnov

Proceedings Volume 7025, 70251H (2008) https://doi.org/10.1117/12.802502

KEYWORDS: Switches, Resonators, Optical fabrication, Computer aided design, Chemical elements, Device simulation, Microelectromechanical systems, Capacitance, Bridges, Aluminum

Read Abstract +

Proceedings Article | 27 December 1996 Paper

Laser direct writing system for fabrication of smooth-relief micro-optical elements

V. Svetovoy, Ildar Amirov, Yu. Babanov

Proceedings Volume 2969, (1996) https://doi.org/10.1117/12.262648

KEYWORDS: Polymers, Laser systems engineering, Microlens, Excimer lasers, Pulsed laser operation, Photoresist materials, Etching, Micro optics, Laser ablation, Surface roughness

Read Abstract +

Showing 5 of 7 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years