Ileana Nedelcu
Student at FOM-Instituut voor Plasmafysica Rijnhuizen
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 28 September 2011 Paper
R. W. van de Kruijs, S. Bruijn, A. Yakshin, I. Nedelcu, F. Bijkerk
Proceedings Volume 8139, 81390A (2011) https://doi.org/10.1117/12.893546
KEYWORDS: Interfaces, Multilayers, Diffusion, Annealing, Reflectivity, Molybdenum, Silicon, Temperature metrology, Thermography, Extreme ultraviolet

SPIE Journal Paper | 1 June 2008
Ileana Nedelcu, Robbert van de Kruijs, Andrey Yakshin, Bernhard von Blanckenhagen, Fred Bijkerk
OE, Vol. 47, Issue 06, 063801, (June 2008) https://doi.org/10.1117/12.10.1117/1.2939403
KEYWORDS: Multilayers, Reflectivity, Surface roughness, Silicon, Atomic force microscopy, Optical coatings, Extreme ultraviolet, EUV optics, X-rays, Scattering

Proceedings Article | 29 March 2007 Paper
A. Yakshin, R. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, F. Bijkerk, H. Enkisch, S. Müllender
Proceedings Volume 6517, 65170I (2007) https://doi.org/10.1117/12.711796
KEYWORDS: Interfaces, Reflectivity, Particles, Multilayers, Sputter deposition, Silicon, Molybdenum, Diffusion, Deposition processes, Boron

Proceedings Article | 21 March 2007 Paper
I. Nedelcu, R. van de Kruijs, A. Yakshin, E. Louis, F. Bijkerk, S. Mullender
Proceedings Volume 6517, 651730 (2007) https://doi.org/10.1117/12.712176
KEYWORDS: Multilayers, Reflectivity, Surface roughness, Silicon, Atomic force microscopy, Extreme ultraviolet lithography, Scattering, Zerodur, Semiconducting wafers, Silver

Proceedings Article | 10 September 2005 Paper
E. Louis, A. Yakshin, E. Zoethout, R. van de Kruijs, I. Nedelcu, S. van der Westen, T. Tsarfati, F. Bijkerk, H. Enkisch, S. Müllender, B. Wolschrijn, B. Mertens
Proceedings Volume 5900, 590002 (2005) https://doi.org/10.1117/12.616902
KEYWORDS: Optical coatings, Multilayers, Reflectivity, Extreme ultraviolet, Astronomy, Extreme ultraviolet lithography, Silver, Astronomical imaging, Molybdenum, Oxidation

Showing 5 of 6 publications
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