Ileana Nedelcu
Student at FOM-Instituut voor Plasmafysica Rijnhuizen
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | September 28, 2011
Proc. SPIE. 8139, Advances in X-Ray/EUV Optics and Components VI
KEYWORDS: Thermography, Multilayers, Annealing, Interfaces, Silicon, Diffusion, Reflectivity, Extreme ultraviolet, Molybdenum, Temperature metrology

SPIE Journal Paper | June 1, 2008
OE Vol. 47 Issue 06
KEYWORDS: Multilayers, Reflectivity, Surface roughness, Silicon, Atomic force microscopy, Optical coatings, Extreme ultraviolet, EUV optics, X-rays, Scattering

PROCEEDINGS ARTICLE | March 29, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Multilayers, Sputter deposition, Particles, Interfaces, Silicon, Diffusion, Reflectivity, Boron, Deposition processes, Molybdenum

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Multilayers, Scattering, Silicon, Silver, Reflectivity, Surface roughness, Atomic force microscopy, Extreme ultraviolet lithography, Semiconducting wafers, Zerodur

PROCEEDINGS ARTICLE | September 10, 2005
Proc. SPIE. 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
KEYWORDS: Multilayers, Astronomy, Silver, Optical coatings, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Astronomical imaging, Molybdenum, Oxidation

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Optical components, Mirrors, Multilayers, Silver, Optical coatings, Reflectivity, Projection systems, Extreme ultraviolet lithography, Semiconducting wafers, Fiber optic illuminators

Showing 5 of 6 publications
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