Dr. Imelda P. Keen
Research Fellow at Univ of Queensland
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 21 March 2012 Paper
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Etching, Polymers, Glasses, Photoresist materials, Directed self assembly, Extreme ultraviolet lithography, Picosecond phenomena, Line edge roughness, Reactive ion etching

Proceedings Article | 4 April 2011 Paper
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Electron beam lithography, Electron beams, Annealing, Scanning electron microscopy, Photoresist materials, Extreme ultraviolet, Directed self assembly, Extreme ultraviolet lithography, Double patterning technology, Line edge roughness

Proceedings Article | 31 October 2001 Paper
Proc. SPIE. 4469, Raman Spectroscopy and Light Scattering Technologies in Materials Science
KEYWORDS: Polymers, Spectroscopy, Particles, Crystals, Chemistry, Oxygen, Raman spectroscopy, Picosecond phenomena, Plasma treatment, Plasma

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