Imen Rezadad
PhD Candidate at Univ of Central Florida
SPIE Involvement:
Author
Area of Expertise:
MEMS , Failure Analysis , NEMS , Semiconductor Device Fabrication
Publications (6)

PROCEEDINGS ARTICLE | June 24, 2014
Proc. SPIE. 9070, Infrared Technology and Applications XL
KEYWORDS: Microelectromechanical systems, Infrared detectors, Oxides, Thermography, Switching, Sensors, Metals, Finite element methods, Infrared radiation, Aluminum

PROCEEDINGS ARTICLE | June 24, 2014
Proc. SPIE. 9070, Infrared Technology and Applications XL
KEYWORDS: Microelectromechanical systems, Infrared detectors, Actuators, Oxides, Infrared sensors, Metals, Scanning electron microscopy, Finite element methods, Micromirrors, Infrared radiation

PROCEEDINGS ARTICLE | June 18, 2013
Proc. SPIE. 8704, Infrared Technology and Applications XXXIX
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Signal to noise ratio, Silica, Sensors, Metals, Time metrology, Convection, Technetium

PROCEEDINGS ARTICLE | June 6, 2013
Proc. SPIE. 8708, Window and Dome Technologies and Materials XIII
KEYWORDS: Bolometers, Gold, Infrared bolometers, Optical lithography, Polymers, Metals, Reflectivity, Scanning electron microscopy, Infrared radiation, Photomasks

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Dry etching, Ultraviolet radiation, Ions, Oxygen, Plasma etching, Reactive ion etching, Plasma

PROCEEDINGS ARTICLE | May 31, 2012
Proc. SPIE. 8353, Infrared Technology and Applications XXXVIII
KEYWORDS: Mid-IR, Electron beam lithography, Transformers, Resonators, Waveguides, Sensors, Spectroscopy, Silicon, Wave propagation, Light wave propagation

Showing 5 of 6 publications
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