In-Hyouk Song
Graduate Student at Louisiana State Univ
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Oxides, Sensors, Nickel, Photoresist materials, Boron, Field effect transistors, Position sensors, Semiconducting wafers, Electroplating

PROCEEDINGS ARTICLE | July 22, 2003
Proc. SPIE. 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Fabrication, Oxides, Sensors, Amplifiers, Signal processing, Transistors, Field effect transistors, Beam shaping, Molybdenum, Device simulation

PROCEEDINGS ARTICLE | July 11, 2002
Proc. SPIE. 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Oxides, Resonators, Nickel, Diffusion, Finite element methods, Field effect transistors, Structural design, Neodymium, Electroplating

PROCEEDINGS ARTICLE | August 16, 2001
Proc. SPIE. 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS
KEYWORDS: Microelectromechanical systems, Oxides, Electronics, Etching, Copper, Nickel, Photomasks, Field effect transistors, Plating, Prototyping

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