In-Yong Kang
PhD Candidate at Hanyang Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Deep ultraviolet, Etching, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Aluminum, Optical simulations, Extreme ultraviolet lithography, Ruthenium

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Image processing, Reflectivity, Chromium, Numerical modeling, Photomasks, Extreme ultraviolet lithography, Geometrical optics, Tantalum, Systems modeling

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