Ms. Inbal Weisbord Profile

Inbal Weisbord

at Technion-Israel Institute of Technology

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Author

Publications (2)

Proceedings Article | 13 June 2022 Presentation

Sequential infiltration synthesis for precise and three-dimensional nanofabrication

Rotem Azoulay, Inbal Weisbord, Maya Barzilay, Tamar Segal-Peretz

Proceedings Volume PC12054, PC120540C (2022) https://doi.org/10.1117/12.2618249

KEYWORDS: Polymers, Nanofabrication, Atomic layer deposition, Oxides, Optical lithography, Metals, X-rays, X-ray microscopy, Transmission electron microscopy, Polymer chemistry

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SPIE Journal Paper | 27 January 2022

Development and evaluation of three-dimensional metrology of nanopatterns using electron microscopy

Neta Shomrat, Konstantin Chirko, Inbal Weisbord, Yan Avniel, Sergey Khristo, David Nessim, Alon Litman, Tamar Segal-Peretz

JM3, Vol. 21, Issue 02, 021202, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021202

KEYWORDS: 3D metrology, Scanning electron microscopy, Scanning transmission electron microscopy, Tomography, Line edge roughness, Sensors, 3D image processing, Metrology, Calibration, Transmission electron microscopy

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