Mr. Ingo Steingoetter
at Univ Kaiserslautern
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 17, 2003
Proc. SPIE. 4984, Micromachining Technology for Micro-Optics and Nano-Optics
KEYWORDS: Silica, Waveguides, Etching, Dry etching, Ions, Resistance, Photoresist materials, Photomasks, Wet etching, Plasma

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