Ingomar Schmidt
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 August 2006
Proc. SPIE. 6292, Interferometry XIII: Techniques and Analysis
KEYWORDS: Mirrors, Interferometers, Sensors, Calibration, Control systems, Demodulation, Time metrology, Laser stabilization, Motion measurement, Motion analysis

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Nanotechnology, Microscopes, Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Optical testing, Spatial resolution, Sensor technology

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