Iñigo Garbayo
Ph.D. Student at Ctr Nacional de Microelectrónica
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 2 June 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Oxides, Thin films, Energy efficiency, Electrodes, Metals, Ceramics, Silicon, Power supplies, Electronic components, Solids, Microfabrication, Hydrogen fuel cells

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Oxides, Methane, Silica, Silicon, Hydrogen, Bioalcohols, Microfabrication, Semiconducting wafers, Hydrogen production, Temperature metrology

Proceedings Article | 19 May 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Oxides, Electrodes, Annealing, X-ray diffraction, Silicon, Solids, Pulsed laser deposition, Semiconducting wafers, Zirconium dioxide

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