The fabricated system is advantageous due to its low cost and simple structure. This is possible because it replaces many optical lenses and expensive equipment with optical fibers. We tested various optical fibers to select a suitable fiber for effective micro flow cell cytometry. In order to align between micro nozzle and optical fibers, a guide channel was fabricated by Si wafer etching with MEMS (Micro Electro-Mechanical System) technology. The micro flow cell cytometry using optical science and MEMS technology. The optical science using multi mode optical fiber and He-Ne laser (20mW, 658nm). The guide channel was fabricated by MEMS technology. The output voltage was as high as about 300 mV, so we are going to use a light source which has relatively small output power. By injecting various cells, we were able to detect cells. In addition, we can use the micro flow cell cytometry for analyzing cells (1, 2). We have no doubt that this micro flow cell cytometry can contribute to the development of biological engineering and clinical testing and it can be practically used in diagnoses of particular diseases and biological symptoms and invitro diagnostics (7, 8).