Dr. Ir Kusnadi
Staff Engineer at Siemens EDA
SPIE Involvement:
Publications (17)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 1295538 (2024) https://doi.org/10.1117/12.3010845
KEYWORDS: Contour modeling, Optical proximity correction, Contour extraction, Scanning electron microscopy, Deformation, Edge roughness, Calibration, Spectral density, Performance modeling, SRAF

SPIE Journal Paper | 19 October 2023
JM3, Vol. 22, Issue 04, 041603, (October 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041603
KEYWORDS: Modeling, Data modeling, Semiconducting wafers, Optical proximity correction, Contour modeling, Metrology, Calibration, Stochastic processes, Scanning electron microscopy, Performance modeling

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 1161112 (2021) https://doi.org/10.1117/12.2583837
KEYWORDS: Optical proximity correction, Electron beam lithography, 3D modeling, Inspection, Calibration, Lithography, Data modeling, Time metrology, Semiconducting wafers, Scanning electron microscopy

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 1132524 (2020) https://doi.org/10.1117/12.2554527
KEYWORDS: Scanning electron microscopy, Data modeling, Calibration, Optical proximity correction, Semiconducting wafers, Metrology, Image processing, 3D modeling, Photomasks, Image quality

Proceedings Article | 14 October 2011 Paper
Proceedings Volume 8166, 81661S (2011) https://doi.org/10.1117/12.898843
KEYWORDS: Optical proximity correction, Calibration, Photomasks, Data modeling, Semiconducting wafers, Scanning electron microscopy, Panoramic photography, Visualization, Process modeling, Cadmium

Showing 5 of 17 publications
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