Dr. Ir Kusnadi
Staff Engineer at Mentor, a Siemens Business
SPIE Involvement:
Author
Publications (13)

PROCEEDINGS ARTICLE | October 14, 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Cadmium, Data modeling, Visualization, Calibration, Scanning electron microscopy, Photomasks, Optical proximity correction, Panoramic photography, Semiconducting wafers, Process modeling

PROCEEDINGS ARTICLE | April 20, 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Cadmium, Data modeling, Visualization, Calibration, Scanning electron microscopy, Photomasks, Optical proximity correction, Optical alignment, Panoramic photography, Semiconducting wafers

SPIE Journal Paper | January 1, 2011
JM3 Vol. 10 Issue 1
KEYWORDS: Scanning electron microscopy, Optical proximity correction, Calibration, Image quality, Electron microscopes, Lithography, Semiconducting wafers, Critical dimension metrology, Optical alignment, Visualization

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Metrology, Data modeling, Visualization, Calibration, Scanning electron microscopy, Printing, Distance measurement, Optical proximity correction, Optical alignment, Semiconducting wafers

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, Edge detection, Visualization, Calibration, Image acquisition, Scanning electron microscopy, Image quality, Optical proximity correction, Semiconducting wafers, Alignment procedures

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Metrology, Data modeling, Visualization, Calibration, Error analysis, Scanning electron microscopy, Printing, Image filtering, Optical proximity correction, Statistical modeling

Showing 5 of 13 publications
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