Dr. Ir Kusnadi
Staff Engineer at Siemens EDA
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Lithography, Electron beam lithography, Data modeling, Calibration, Inspection, 3D modeling, Scanning electron microscopy, Time metrology, Optical proximity correction, Semiconducting wafers

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Data modeling, Calibration, Image processing, 3D modeling, Scanning electron microscopy, Image quality, Photomasks, Optical proximity correction, Semiconducting wafers

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Cadmium, Data modeling, Visualization, Calibration, Scanning electron microscopy, Photomasks, Optical proximity correction, Panoramic photography, Semiconducting wafers, Process modeling

Proceedings Article | 20 April 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Cadmium, Data modeling, Visualization, Calibration, Scanning electron microscopy, Photomasks, Optical proximity correction, Optical alignment, Panoramic photography, Semiconducting wafers

SPIE Journal Paper | 1 January 2011
JM3 Vol. 10 Issue 1
KEYWORDS: Scanning electron microscopy, Optical proximity correction, Calibration, Image quality, Electron microscopes, Lithography, Semiconducting wafers, Critical dimension metrology, Optical alignment, Visualization

Showing 5 of 15 publications
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