Dr. Irina Lazareva Profile

Dr. Irina Lazareva

Senior Scientist at Fraunhofer-IISB

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Publications (3)

Proceedings Article | 2 September 2010 Paper

Optical inspection of flat reflective surfaces by a wave front sensor

I. Lazareva, A. Nutsch, L. Pfitzner, L. Frey

Proceedings Volume 7792, 77920Q (2010) https://doi.org/10.1117/12.861148

KEYWORDS: Sensors, Wavefronts, Semiconducting wafers, Reflectivity, Silicon, Optical inspection, Polishing, Semiconductors, Image quality, Wavefront sensors

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Proceedings Article | 14 May 2010 Paper

Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafers

I. Lazareva, A. Nutsch, M. Schellenberger, L. Pfitzner, L. Frey

Proceedings Volume 7718, 77181H (2010) https://doi.org/10.1117/12.854332

KEYWORDS: Semiconducting wafers, Silicon, Sensors, Surface finishing, Wafer-level optics, Collimation, Optical inspection, Semiconductors, Image processing, Wavefront sensors

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Proceedings Article | 17 June 2009 Paper

Highly sensitive wavefront sensor for characterization of micro- to nanometer-scale surface flatness deviations

I. Lazareva, A. Nutsch, L. Pfitzner, L. Frey

Proceedings Volume 7389, 73890Q (2009) https://doi.org/10.1117/12.828141

KEYWORDS: Wavefronts, Semiconducting wafers, Surface finishing, Silicon, Polishing, Head, Reflectivity, Profilometers, Mirrors, Wavefront sensors

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