Irina L. Simdikova
at Swinburne Univ of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Fabrication, Confocal microscopy, Microscopes, Diffractive optical elements, Polymers, Nickel, Manufacturing, Scanning electron microscopy, 3D metrology, Picosecond phenomena

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