Irving Plotnik
General Manager at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 16, 1994
Proc. SPIE. 2280, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy V
KEYWORDS: Gold, Lithography, Etching, Spectroscopy, X-rays, Photomasks, Plating, Reactive ion etching, Semiconducting wafers, X-ray lithography

PROCEEDINGS ARTICLE | August 1, 1991
Proc. SPIE. 1465, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing
KEYWORDS: Gold, Opacity, X-rays, Tungsten, Ions, Silicon, Manufacturing, Ion beams, Photomasks, X-ray lithography

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