Proc. SPIE. 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education
KEYWORDS: Semiconductors, Holography, Polarization, Photonic crystals, Electron microscopes, Scanning electron microscopy, Process control, Atomic force microscope, Light wave propagation, Band structure simulations
We have fabricated 2D photonic crystal films by holographic method. Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM) images show that the structures are two- dimensional in the sub-micrometric scale and the structure is perfectly ordered. The dimension in the plane of the films can be up to 50x50 mm2. Both triangular and square Lattices were made.
Band structure was also simulated using the plane wave expansion method.
We tried in particular to better control the fabrication process in order to have the photonic gap in the desired wavelength range.
We obtained amorphous carbon (a-C) thin films, deposited on glass and silicon substrates, by sputtering radio frequency (RF) from a pure graphite target. The properties of these layers are studied by x-ray reflectometry. We present here a precise and simple method to measure layer thicknesses and densities.