Mr. Israel Reichental Profile

Israel Reichental

at Bruker Technologies Ltd.

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 22 March 2023 Open Access

Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering

Peter Gin, Matthew Wormington, Yehonatan Amasay, Inbar Grinberg, Alexander Brady, Israel Reichental, Kevin Matney, Jin Zhang, Osman Sorkhabi

JM3, Vol. 22, Issue 03, 031205, (March 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031205

KEYWORDS: Semiconducting wafers, X-rays, Metrology, Scattering, Etching, 3D modeling, Model-based design, Laser scattering, Critical dimension metrology, Nondestructive evaluation

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Proceedings Article | 22 February 2021 Presentation + Paper

X-ray critical dimension metrology solution for high aspect ratio semiconductor structures

Matthew Wormington, Adam Ginsburg, Israel Reichental, Alex Dikopoltsev, Alex Krokhmal, Yuri Vinshtein, Paul Ryan, Rahul Korlahalli, Franklin Wong, Silvio Rabello, Yang Song, Jie Li

Proceedings Volume 11611, 116110W (2021) https://doi.org/10.1117/12.2583966

KEYWORDS: X-rays, Semiconductors, Critical dimension metrology, Semiconducting wafers, Metrology, X-ray characterization, Scattering, Etching, Capacitors, 3D metrology

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