Issam M. Bait Bahadur
at Univ of Toronto
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 January 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Microfluidics, Resonators, Sensors, Silicon, Reliability, 3D modeling, Capacitance, Factor analysis, Surface micromachining

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