Itaru Kamohara
SPIE Involvement:
Publications (8)

Proceedings Article | 24 March 2017 Presentation + Paper
Proceedings Volume 10143, 101430I (2017)
KEYWORDS: Extreme ultraviolet lithography, Optical lithography, 3D modeling, Data modeling, Resistance, Photomasks, Calibration, Stochastic processes, Semiconducting wafers

Proceedings Article | 26 March 2015 Paper
Nicoló Morgana, Dmitrii Gavrilin, Andreas Greiner, Detlef Hofmann, Itaru Kamohara, Ulrich Klostermann, Holger Moeller, Juergen Preuninger
Proceedings Volume 9426, 94260S (2015)
KEYWORDS: Optical alignment, Semiconducting wafers, Signal processing, Silicon, Oxides, Computer simulations, Manufacturing, Visualization, Metals, Etching

Proceedings Article | 19 March 2015 Paper
Proceedings Volume 9422, 942223 (2015)
KEYWORDS: Line width roughness, Stochastic processes, Calibration, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Data modeling, Scanning electron microscopy, Photoresist processing, Photomasks

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 90520C (2014)
KEYWORDS: 3D modeling, Etching, Atrial fibrillation, Scanning electron microscopy, Semiconducting wafers, Photoresist processing, Data modeling, Calibration, Optical proximity correction, Optical lithography

Proceedings Article | 20 May 2011 Paper
Proceedings Volume 8081, 80810R (2011)
KEYWORDS: Ellipsometry, Lithography, Semiconducting wafers, Signal processing, Signal detection, Diffraction, Etching, Photoresist processing, Nanoimprint lithography, Wafer-level optics

Showing 5 of 8 publications
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