Dr. Ivan Hotovy
at Slovak Technical Univ in Bratislava
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 May 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Microelectromechanical systems, Gas sensors, Etching, Gallium arsenide, Resistance, 3D modeling, Temperature sensors, Thermal effects, Temperature metrology, Bulk micromachining

Proceedings Article | 15 May 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Carbon, Cadmium, Calibration, Electrodes, Metals, Nitrogen, Zinc, Bismuth, Plating, Lead

Proceedings Article | 23 September 1996
Proc. SPIE. 2879, Micromachining and Microfabrication Process Technology II
KEYWORDS: Etching, Dry etching, Copper, Nickel, Silicon, Gases, Chromium, Reactive ion etching, Plasma, Anisotropy

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