Dr. Ivan Khorin
at Ioffe Institute
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Gold, Thin films, Sensors, Quartz, Sputter deposition, Metals, Copper, Silicon, Scanning electron microscopy, Microwave radiation

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Thin films, Multilayers, Argon, Sputter deposition, Annealing, Copper, Diffusion, Resistance, Scanning electron microscopy, Tantalum

PROCEEDINGS ARTICLE | February 26, 2010
Proc. SPIE. 7521, International Conference on Micro- and Nano-Electronics 2009
KEYWORDS: Thin films, Multilayers, Electron beams, Chemical species, Sputter deposition, Annealing, Copper, Silicon, Diffusion, Hafnium

PROCEEDINGS ARTICLE | April 29, 2008
Proc. SPIE. 7025, Micro- and Nanoelectronics 2007
KEYWORDS: Semiconductors, Dielectrics, Electrons, Silicon, Diffusion, Monte Carlo methods, Transistors, Field effect transistors, TCAD, Instrument modeling

PROCEEDINGS ARTICLE | April 29, 2008
Proc. SPIE. 7025, Micro- and Nanoelectronics 2007
KEYWORDS: Oxides, Thin films, Silica, Dielectrics, Interfaces, Silicon, Diffusion, Oxygen, Transmission electron microscopy, Zirconium dioxide

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