Ivan Lalovic
Founder and Chief Engineer at Gybe LLC
SPIE Involvement:
Publications (23)

Proceedings Article | 4 April 2014 Paper
Proceedings Volume 9052, 905228 (2014) https://doi.org/10.1117/12.2047449
KEYWORDS: Semiconducting wafers, Optical lithography, Critical dimension metrology, Modulation, Lithography, Metrology, Wafer-level optics, Scatterometry, Double patterning technology, Photomasks

Proceedings Article | 12 April 2013 Paper
Proceedings Volume 8683, 86830S (2013) https://doi.org/10.1117/12.2013213
KEYWORDS: Semiconducting wafers, Lithography, Optical lithography, Metrology, Polarization, Light sources, Critical dimension metrology, Scanners, Control systems, Lithographic illumination

Proceedings Article | 13 March 2012 Paper
R. Peng, I. Huang, H. Liu, H. J. Lee, John Lin, Arthur Lin, Allen Chang, Benjamin Szu-Min Lin, Ivan Lalovic
Proceedings Volume 8326, 83260X (2012) https://doi.org/10.1117/12.916420
KEYWORDS: Double patterning technology, Critical dimension metrology, Etching, Lithography, Optical lithography, Photomasks, Photoresist materials, Logic, Optical simulations, Cadmium

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 797328 (2011) https://doi.org/10.1117/12.882391
KEYWORDS: Laser drilling, Lithography, Metrology, Semiconducting wafers, Electroluminescence, Optical lithography, Immersion lithography, Critical dimension metrology, Photomasks, Chromatic aberrations

Proceedings Article | 4 March 2010 Paper
Proceedings Volume 7640, 76402B (2010) https://doi.org/10.1117/12.846552
KEYWORDS: Laser stabilization, Optical simulations, Overlay metrology, Chromatic aberrations, Laser applications, Lithography, Metrology, Distortion, Immersion lithography, Critical dimension metrology

Showing 5 of 23 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top