Dr. Ivan Pollentier
Process Engineer Lithography at imec
SPIE Involvement:
Publications (62)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530M (2024) https://doi.org/10.1117/12.3010378
KEYWORDS: Pellicles, Extreme ultraviolet lithography, Scanners, Permeability, Extreme ultraviolet, Plasma, Materials properties, Resistance, Hydrogen, Fabrication

Proceedings Article | 1 May 2023 Presentation + Paper
Laura Galleni, Faegheh Sajjadian, Thierry Conard, Ivan Pollentier, Kevin Dorney, Fabian Holzmeier, Esben Witting Larsen, Daniel Escudero, Geoffrey Pourtois, Michiel van Setten, Paul van der Heide, John Petersen
Proceedings Volume 12498, 124980W (2023) https://doi.org/10.1117/12.2660047
KEYWORDS: X-ray photoelectron spectroscopy, Extreme ultraviolet lithography, Photoacid generators, Ultrafast phenomena, X-rays, Photoresist materials, Quantum processes, Extreme ultraviolet, Lithography, Stochastic processes

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940E (2023) https://doi.org/10.1117/12.2660595
KEYWORDS: Pellicles, Semiconducting wafers, Scanners, Reticles, Extreme ultraviolet lithography, Extreme ultraviolet, Plasma, Hydrogen

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940D (2023) https://doi.org/10.1117/12.2658353
KEYWORDS: Pellicles, Extreme ultraviolet, Scanners, Extreme ultraviolet lithography, Deep ultraviolet, Reticles, Semiconducting wafers, Composites, Particles, Metals

Proceedings Article | 7 June 2022 Presentation
Proceedings Volume PC12054, PC1205402 (2022) https://doi.org/10.1117/12.2622565
KEYWORDS: Directed self assembly, Extreme ultraviolet lithography, Optical lithography, Extreme ultraviolet, Semiconductors, Semiconducting wafers, Lithography, Light-matter interactions

Showing 5 of 62 publications
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