Mr. Ivan R. Sedlacek Profile

Ivan R. Sedlacek

at Brewer Science Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper

Yichen Liang, Andrea Chacko, Samantha Oelklaus, Ethan Lowrey, Veerle Van Driessche, Ivan Sedlacek, Ming Luo, Stephen Grannemann, Douglas Guerrero

Proceedings Volume 11326, 1132614 (2020) https://doi.org/10.1117/12.2551671

KEYWORDS: Lithography, Silicon, Extreme ultraviolet lithography, Line width roughness, Polymers, Plasma etching, Photoresist materials

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Keywords/Phrases