Dr. Ivan A. Shchelkanov
at Univ of Illinois
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | February 9, 2015
JM3 Vol. 14 Issue 01
KEYWORDS: Ions, Extreme ultraviolet, Magnetism, Plasma, Extreme ultraviolet lithography, Argon, Electrons, Metrology, Computer simulations, Lithography

PROCEEDINGS ARTICLE | January 7, 2015
Proc. SPIE. 9442, Optics and Measurement Conference 2014
KEYWORDS: Polishing, Silica, Sputter deposition, Nickel, Ions, Silicon, Surface roughness, Power supplies, Aluminum, Plasma

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