Ivanie Mendes
SPIE Involvement:
Publications (8)

Proceedings Article | 10 April 2024 Poster
Ujwol Palanchoke, Florian Tomaso, Yorrick Exbrayat, Gaby Bélot, Marie-Line Pourteau, Ivanie Mendes, Juline Saugnier, Aurélien Fay, Sébastien Bérard-Bergery, Elodie Sungauer, Charlotte Beylier, Rémi Coquand, Arthur Bernadac
Proceedings Volume PC12956, PC129560Y (2024) https://doi.org/10.1117/12.3010850
KEYWORDS: 3D mask effects, Grayscale lithography, 3D modeling, Data modeling, 3D microstructuring, 3D acquisition, Semiconductors, Profilometers, Process control, Photoresist processing

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12956, 129560L (2024) https://doi.org/10.1117/12.3009978
KEYWORDS: Nanoimprint lithography, Manufacturing, Atomic force microscopy, Electron beam lithography, Deformation, Shrinkage, Semiconducting wafers, Scanning electron microscopy, Photoresist processing, Standards development, Grayscale lithography

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12956, 1295606 (2024) https://doi.org/10.1117/12.3010477
KEYWORDS: Wafer bonding, Semiconducting wafers, Distortion, Scanners, Silicon, Optical alignment, Deformation, Adhesion, Etching, Metrology

Proceedings Article | 1 May 2023 Presentation + Paper
Ujwol Palanchoke, Gaby Bélot, Sébastien Bérard-Bergery, Juline Saugnier, Elodie Sungauer, Charlotte Beylier, Florian Tomaso, Marie-Line Pourteau, Ivanie Mendes, Rémi Coquand, Arthur Bernadac
Proceedings Volume 12497, 124970N (2023) https://doi.org/10.1117/12.2657600
KEYWORDS: Critical dimension metrology, 3D mask effects, Microlens, Design and modelling, Cadmium, Scanning electron microscopy, Semiconducting wafers, Error analysis, 3D acquisition, Grayscale lithography

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 1249633 (2023) https://doi.org/10.1117/12.2658296
KEYWORDS: Annealing, Semiconducting wafers, Metrology, Distortion, Overlay metrology, Deformation, Chemical mechanical planarization, Silicon, Optical interferometry, Manufacturing

Showing 5 of 8 publications
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