Dr. Iwao Nishiyama
Research Manager at Semiconductor Leading Edge Technologies Inc
SPIE Involvement:
Publications (59)

Proceedings Article | 29 September 2010 Paper
Noriaki Takagi, Toshihisa Anazawa, Iwao Nishiyama, Osamu Suga
Proceedings Volume 7823, 782327 (2010) https://doi.org/10.1117/12.864294
KEYWORDS: Reflectivity, Contamination, Plasma, Oxygen, Silica, Ruthenium, Silicon, Carbon, Scanning probe microscopy, Oxidation

SPIE Journal Paper | 1 April 2010
JM3, Vol. 9, Issue 02, 023005, (April 2010) https://doi.org/10.1117/12.10.1117/1.3378154
KEYWORDS: Photomasks, Etching, Extreme ultraviolet lithography, Image processing, Multilayers, Photoresist processing, Photovoltaics, Lithography, Extreme ultraviolet, Coating

Proceedings Article | 4 April 2008 Paper
Shinji Tanaka, Nobuaki Matsumoto, Hidetoshi Ohno, Naoyoshi Hatakeyama, Katsuki Ito, Kazuya Fukushima, Hiroaki Oizumi, Iwao Nishiyama
Proceedings Volume 6923, 69231J (2008) https://doi.org/10.1117/12.772249
KEYWORDS: Glasses, Lithography, Refractive index, Polymers, Transparency, Extreme ultraviolet lithography, Radium, Optical lithography, Immersion lithography, Sulfur

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 692346 (2008) https://doi.org/10.1117/12.772404
KEYWORDS: Extreme ultraviolet lithography, Line edge roughness, Etching, Extreme ultraviolet, Glasses, Molecules, Lithography, Polymers, Optical lithography, Synchrotrons

Proceedings Article | 21 March 2008 Paper
Proceedings Volume 6921, 69213E (2008) https://doi.org/10.1117/12.774012
KEYWORDS: Bioalcohols, Ruthenium, Telescopic pixel displays, Carbon, Carbon monoxide, Extreme ultraviolet lithography, Chemistry, Mirrors, Adsorption, Extreme ultraviolet

Showing 5 of 59 publications
Conference Committee Involvement (3)
Extreme Ultraviolet (EUV) Lithography III
13 February 2012 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography II
28 February 2011 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography
22 February 2010 | San Jose, California, United States
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