Dr. J. Christopher Taylor
R&D Engineer at SUNY Poly SEMATECH
SPIE Involvement:
Publications (10)

Proceedings Article | 2 April 2010 Paper
Andrew Rudack, Pratibha Singh, J. Christopher Taylor, Vadim Mashevsky
Proceedings Volume 7638, 763815 (2010) https://doi.org/10.1117/12.848400
KEYWORDS: Semiconducting wafers, Overlay metrology, Wafer bonding, Infrared microscopy, Microscopy, Tolerancing, Optical alignment, 3D metrology, Infrared imaging, Copper

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 69230B (2008) https://doi.org/10.1117/12.772979
KEYWORDS: Absorbance, Water, Optical properties, Immersion lithography, Refraction, Absorption, Carbon, Sodium, Refractive index, Electrons

Proceedings Article | 29 March 2006 Paper
Proceedings Volume 6153, 61530B (2006) https://doi.org/10.1117/12.656637
KEYWORDS: Absorbance, Water, Refraction, Digital micromirror devices, Immersion lithography, Metals, Interfaces, Reflection, Refractive index, Optical properties

Proceedings Article | 23 March 2006 Paper
J. Christopher Taylor, Tim Hostetler, Pavel Kornilovich, Ken Kramer
Proceedings Volume 6151, 61510L (2006) https://doi.org/10.1117/12.656688
KEYWORDS: Photonic crystals, Lithography, Polymers, Composites, Nanoparticles, Refractive index, Dielectrics, Refraction, Crystals, Photorefractive polymers

Proceedings Article | 21 March 2006 Paper
Proceedings Volume 6154, 61544P (2006) https://doi.org/10.1117/12.656482
KEYWORDS: Semiconducting wafers, Microfluidics, Photomasks, Polymers, Glasses, Immersion lithography, Photoresist materials, Dewetting, Reflection, Scanners

Showing 5 of 10 publications
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