J. Martin Algots
Engineering Consultant at Algots Design
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Lithium, Metals, Ultraviolet radiation, High power lasers, Extreme ultraviolet, Plasma generation, Plasma, Liquids, Tin

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Refractive index, Reticles, Data modeling, Silica, Interferometry, Wavefronts, Wavefront aberrations, Projection systems, Statistical modeling, Performance modeling

Proceedings Article | 26 June 2003 Paper
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Refractive index, Optical lithography, Data modeling, Silica, Laser induced damage, Laser energy, Wavefronts, Excimer lasers, Pulsed laser operation, Statistical modeling

Proceedings Article | 14 September 2001 Paper
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Actuators, Mirrors, Ferroelectric materials, Fluctuations and noise, Sensors, Control systems, Servomechanisms, Excimer lasers, Acoustics, Active vibration control

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