Dr. Tracy Weed Profile

Dr. Tracy Weed

Sr. Director at Synopsys Inc

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 3 February 2000 Paper

Mask quality (control) evaluation using the Virtual Stepper System (VSS)

Linard Karklin, J. Tracy Weed, Junling Li

Proceedings Volume 3996, (2000) https://doi.org/10.1117/12.377101

KEYWORDS: Reticles, Photomasks, Critical dimension metrology, Manufacturing, Semiconducting wafers, Inspection, Control systems, Lithography, Lithium, Design for manufacturability

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Proceedings Article | 17 May 1994 Paper

Comprehensive evaluation of major phase-shift mask technologies for isolated gate structures in logic designs

Lars Liebmann, Thomas Newman, Richard Ferguson, Ronald Martino, Antoinette Molless, Mark Neisser, J. Tracy Weed

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175455

KEYWORDS: Computer aided design, Photomasks, Lithography, Logic, Phase shifts, Semiconducting wafers, Manufacturing, Phase shifting, Tolerancing, Deep ultraviolet

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Proceedings Article | 17 May 1994 Paper

Application of the aerial image measurement system (AIMS)TM to the analysis of binary mask imaging and resolution enhancement techniques

Ronald Martino, Richard Ferguson, Russell Budd, John Staples, Lars Liebmann, Antoinette Molless, Derek Dove, J. Tracy Weed

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175452

KEYWORDS: Photomasks, Binary data, Imaging systems, Resolution enhancement technologies, Image enhancement, Lithography, Semiconducting wafers, Reticles, Deep ultraviolet, Microelectronics

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