Dr. Julien Ducote
Research Engineer at STMicroelectronics SA
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Metrology, Visualization, Etching, Image processing, Electron microscopes, Distortion, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Overlay metrology

Proceedings Article | 27 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Analytics, Metrology, Optical lithography, Visualization, Image processing, Silicon, Doping, Scanning electron microscopy, Image quality, Process control, Optical proximity correction

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Etching, Image processing, Image analysis, Scanning electron microscopy, Image quality, Process control, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 19 September 2018 Paper
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Lithography, Metrology, Convolutional neural networks, Data modeling, Imaging systems, Image processing, Microlens, Neural networks, Image classification, Semiconducting wafers

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, CMOS sensors, Metrology, Image processing, Quantum efficiency, Photodiodes, Scanning electron microscopy, Microlens, Neural networks

Showing 5 of 13 publications
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