Diamond like-carbon films were fabricated by pulsed laser ablation of a liquid target (vacuum oil) in a very small
(volume below 1 cm<sup>3</sup>) vacuum chamber, where the film was deposited onto the inner surface of the chamber window.
The synthesis was carried out at room temperature using 248 nm KrF excimer laser. The sp<sup>3</sup> hybridization carbon
formation was additionally promoted by gaseous H<sub>2</sub>O<sub>2</sub> flow through the reaction chamber.
Deposited diamond-like carbon films were characterized by Raman scattering spectroscopy, optical and atomic force
microscopy. The results indicated that higher sp<sup>3</sup> content was present in the film areas exposed to the laser irradiation
during the deposition. The surface roughness of these areas was lower compared with that of the non-irradiated areas.
Optical microscopy observations indicated that the films had interference-colored regions on laser irradiated areas. These
colored regions were significantly different from their surroundings, which were grey or brown. Thus, the interferencecolored
regions have very wide band gap (&Dgr;E > 3 eV) and accordingly, high sp<sup>3</sup> hybridized carbon content.
Thin films of erbium-doped YAG (Y<SUB>3</SUB>Al<SUB>5</SUB>O<SUB>12</SUB>) were grown by pulsed laser deposition, followed by high temperature (>1100 degree(s)C) post-annealing. The deposition was carried out on MgO and MgAl<SUB>2</SUB>O<SUB>4</SUB> substrates in ultra-high vacuum chamber with KrF excimer laser at fluences 2.5-3 J/cm<SUP>2</SUP>. Influence of growth conditions (substrate temperature, gas environment, annealing temperature) on structural, topographical, and optical properties was investigated by using optical spectroscopy, X-ray diffraction, and atomic force microscopy.