Mr. Jaap P. Verheggen
at Innoluce BV
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Gold, Diffraction, Switches, Switching, Electrodes, Microopto electromechanical systems, Photomasks, Aluminum, Optical switching, Diffraction gratings

PROCEEDINGS ARTICLE | January 21, 2003
Proc. SPIE. 4983, MOEMS and Miniaturized Systems III
KEYWORDS: Microelectromechanical systems, Optical fabrication equipment, Electrodes, Reflectivity, Optical testing, Microopto electromechanical systems, Integrated optics, Chemical elements, Optical interconnects, Prototyping

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