Jaap P. Verheggen
at Innoluce BV
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 January 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Electrodes, Diffraction, Microopto electromechanical systems, Diffraction gratings, Switching, Aluminum, Gold, Photomasks, Optical switching, Switches

Proceedings Article | 21 January 2003
Proc. SPIE. 4983, MOEMS and Miniaturized Systems III
KEYWORDS: Prototyping, Microopto electromechanical systems, Reflectivity, Electrodes, Chemical elements, Optical interconnects, Microelectromechanical systems, Optical testing, Integrated optics, Optical fabrication equipment

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