Jacek Gryglewicz
at Wroclaw Univ of Technology
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | July 25, 2013
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Carbon, Refractive index, Atmospheric plasma, Hydrogen, Atomic force microscopy, Raman spectroscopy, Spectroscopic ellipsometry, Plasma enhanced chemical vapor deposition, Deposition processes, Plasma

PROCEEDINGS ARTICLE | July 25, 2013
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Oxides, Refractive index, Argon, Sputter deposition, Dielectrics, Silicon, Oxygen, Aluminum, Gadolinium, Radium

PROCEEDINGS ARTICLE | April 25, 2012
Proc. SPIE. 8425, Photonic Crystal Materials and Devices X
KEYWORDS: Lithography, Refractive index, Beam splitters, Polarization, Etching, Silicon, Photonic crystals, Photonics, Photomasks, Reactive ion etching

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