Mr. Jacek Kacperski
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Publications (13)

PROCEEDINGS ARTICLE | April 25, 2008
Proc. SPIE. 6995, Optical Micro- and Nanometrology in Microsystems Technology II
KEYWORDS: Optical fibers, Microscopes, Beam splitters, Microlens array, Interferometers, Surface roughness, Micro optics, Microlens, Source mask optimization, Spherical lenses

PROCEEDINGS ARTICLE | June 18, 2007
Proc. SPIE. 6616, Optical Measurement Systems for Industrial Inspection V
KEYWORDS: Microelectromechanical systems, Interferometers, Reflectivity, Interferometry, Wavefronts, Spatial light modulators, Liquid crystal on silicon, Liquid crystals, Chemical elements, Phase shifts

PROCEEDINGS ARTICLE | April 28, 2006
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: Mirrors, Ferroelectric materials, Interferometers, Calibration, Silicon, Interferometry, Wavefronts, Spatial light modulators, Liquid crystal on silicon, Phase shifts

PROCEEDINGS ARTICLE | April 28, 2006
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: Optical fibers, Microscopes, Beam splitters, Microlens array, Interferometers, Surface roughness, Micro optics, Microlens, Source mask optimization, Spherical lenses

PROCEEDINGS ARTICLE | October 12, 2005
Proc. SPIE. 5958, Lasers and Applications
KEYWORDS: Microelectromechanical systems, Actuators, Interferometers, Electrodes, Interferometry, Liquid crystal on silicon, Finite element methods, Aluminum nitride, Beam shaping, Phase shifts

PROCEEDINGS ARTICLE | September 1, 2005
Proc. SPIE. 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
KEYWORDS: Microelectromechanical systems, Mirrors, Interferometers, Reflectivity, Interferometry, Wavefronts, Liquid crystal on silicon, Diffusers, Beam expanders, Phase shifts

Showing 5 of 13 publications
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