In this work, the SEMI specification for reticle and pod management (E109) with internal reticle library support has been
integrated for the first time on KLA-Tencor’s Teron<sup>TM</sup> and TeraScan<sup>TM</sup> reticle inspection tools. Manufacturing
Execution System scheduling reticle jobs and Automated Material Handling System scheduling to transfer pods
simultaneously have also been integrated and tested. GLOBALFOUNDRIES collaboratively worked with KLA-Tencor
to successfully implement these capabilities. Both library and non-library scenarios have been demonstrated for
comparison in a real production environment resulting in productivity increase of approximately 29% by making use of
the library. Reticle re-qualification test cases were used for the comparison in this work.