Dr. Jack Liddle Profile

Dr. Jack Liddle

Imaging Scientist

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Publications (1)

Proceedings Article | 29 August 2019 Paper

High-NA EUV imaging: challenges and outlook

Bartosz Bilski, Jörg Zimmermann, Matthias Roesch, Jack Liddle, Eelco van Setten, Gerardo Bottiglieri, Jan van Schoot

Proceedings Volume 11177, 111770I (2019) https://doi.org/10.1117/12.2536329

KEYWORDS: Lithography, Extreme ultraviolet, Projection systems, Diffraction, Extreme ultraviolet lithography, Scanners, EUV optics, Lithographic illumination, Projection lithography, Optical imaging, Computational lithography

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