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Jackie Tan
at GLOBALFOUNDRIES Singapore
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Publications (1)
Proceedings Article | 24 May 2004 Paper
Productivity and yield improvement through implementation of automated defect review SEM at 45° column tilt in a high-capacity production Fab
Jackie Tan, Sandeep Kulkarni, Sern Ng, Alok Jain, Vish Srinivasan, Nurit Raccah, Ofer Rotlevi
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534872
KEYWORDS: Scanning electron microscopy, Particles, Semiconducting wafers, Etching, Inspection, Metals, Yield improvement, Bridges, Silicon, Optical alignment
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