Jacky Chen
at Semiconductor Manufacturing International Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Inspection, Printing, Photomasks, Artificial intelligence, Optical proximity correction, Virtual reality, Semiconducting wafers, Tolerancing, Decision support systems

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