Dr. Jacob Ofek
at Nova Measuring Instruments Inc.
SPIE Involvement:
Publications (6)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129551O (2024) https://doi.org/10.1117/12.3011748
KEYWORDS: Semiconducting wafers, Wafer level optics, Metrology, Silicon, Reactive ion etching, Reflection, Interferometry, Dielectrics, Polarization, Semiconductor manufacturing

Proceedings Article | 10 April 2024 Presentation + Paper
Jaesuk Yoon, Jongmin Park, Minjung Shin, Dongchul Ihm, Oshrat Bismuth, Smadar Ferber, Jacob Ofek, Igor Turovets, Isaac Kim
Proceedings Volume 12955, 129551S (2024) https://doi.org/10.1117/12.3010729
KEYWORDS: Semiconducting wafers, 3D metrology, Silicon, Chemical mechanical planarization, Interferometry, Modeling, Scatterometry, Metrology

SPIE Journal Paper | 21 February 2023 Open Access
JM3, Vol. 22, Issue 03, 031203, (February 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031203
KEYWORDS: Metrology, Interferometry, Data modeling, Tunable filters, Semiconducting wafers, Scatterometry, Optical filters, Machine learning, Education and training, Dielectrics

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 120530S (2022) https://doi.org/10.1117/12.2614077
KEYWORDS: Metrology, Semiconducting wafers, Scatterometry, Optical filters, Dielectrics, Data modeling, Back end of line, Front end of line, Chemical mechanical planarization, Transmission electron microscopy

SPIE Journal Paper | 27 January 2022 Open Access
JM3, Vol. 21, Issue 02, 021203, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021203
KEYWORDS: Silicon, Germanium, Raman spectroscopy, Optical lithography, Manufacturing, Semiconducting wafers, Polarization, Metrology, Raman scattering, Phonons

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