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Jacob J. Orbon
at Applied Materials
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Publications (1)
Proceedings Article | 29 April 2004 Paper
Integrated electrical and SEM-based defect characterization for rapid yield ramp
Jacob Orbon, Lior Levin, Ofer Bokobza, Rinat Shimshi, Manjari Dutta, Brian Zhang, Dennis Ciplickas, Teri Pham, Jim Jensen
Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.536469
KEYWORDS: Failure analysis, Inspection, Statistical analysis, Scanning electron microscopy, Visualization, Electrical breakdown, Diffractive optical elements, Semiconducting wafers, Back end of line, Metals
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