Jae-Hyun Kang
Senior Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (23)

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Phase modulation, Lithography, Image classification, Library classification systems, Visualization, Process modeling, Design for manufacturing, Manufacturing, Yield improvement, Land mines

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8684, Design for Manufacturability through Design-Process Integration VII
KEYWORDS: Lithography, Double patterning technology, Design for manufacturing, Resolution enhancement technologies, Manufacturing, Bridges, Visualization, Design for manufacturability, Metals, Electronics

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Semiconducting wafers, Metals, Process modeling, Image processing, Design for manufacturing, Chemical mechanical planarization, Optical proximity correction, 3D modeling, Photovoltaics, Scanning electron microscopy

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Design for manufacturing, Silicon, Polishing, Optical proximity correction, Back end of line, Metals, Failure analysis, Yield improvement, Logic, Manufacturing

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Silicon, Manufacturing, Lithography, Failure analysis, Data processing, Chemical mechanical planarization, Semiconducting wafers, Design for manufacturability, Tolerancing, Optical lithography

PROCEEDINGS ARTICLE | April 4, 2011
Proc. SPIE. 7974, Design for Manufacturability through Design-Process Integration V
KEYWORDS: Computer aided design, Lithography, Semiconducting wafers, Device simulation, Design for manufacturing, Data modeling, Semiconductors, Manufacturing, Pattern recognition, Visualization

Showing 5 of 23 publications
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