Jae-Hyun Kang
Senior Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 23 March 2020
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Metals, Silicon, Manufacturing, Reliability, Design for manufacturing, Extreme ultraviolet lithography, Optical proximity correction, Semiconducting wafers, Yield improvement, Chemical mechanical planarization

Proceedings Article | 4 April 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Electronics, Data modeling, Manufacturing, Computer simulations, Feature extraction, Neural networks, Design for manufacturing, Machine learning, Design for manufacturability

Proceedings Article | 18 March 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Phase modulation, Visualization, Manufacturing, Design for manufacturing, Image classification, Yield improvement, Process modeling, Land mines, Library classification systems

Proceedings Article | 29 March 2013
Proc. SPIE. 8684, Design for Manufacturability through Design-Process Integration VII
KEYWORDS: Lithography, Electronics, Visualization, Metals, Manufacturing, Bridges, Design for manufacturing, Double patterning technology, Resolution enhancement technologies, Design for manufacturability

Showing 5 of 26 publications
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