Dr. Jae-Hyun Kim
Manager at Dongjin Semichem Co Ltd
SPIE Involvement:
Author
Publications (31)

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Etching, Polymers, Nitrogen, Scanning electron microscopy, Photoresist materials, Polymerization, Particle swarm optimization, Photoresist processing, Photoresist developing

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Etching, Polymers, Reflectivity, Photoresist materials, Double patterning technology, Critical dimension metrology, Photoresist developing, Temperature metrology, Bottom antireflective coatings

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Thin films, Lithography, Polymers, Molecules, X-rays, Interfaces, Reflectivity, Photoresist materials, Molecular interactions, Polymer thin films

Proceedings Article | 23 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Optical lithography, Deep ultraviolet, Polymers, Diffusion, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers, Chemically amplified resists

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Polymers, Glasses, X-rays, Reflectivity, Extreme ultraviolet, Line width roughness, Chemical analysis, Extreme ultraviolet lithography, Molecular interactions

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Carbon, Lithography, Refractive index, Ultraviolet radiation, Silicon, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Ruthenium

Showing 5 of 31 publications
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